Micromachined Shear Sensors for Fluid Flows.

Abstract

The three year program focused on the development of micromachined shear stress sensors for aerodynamic flows. The program supported a Ph.D. candidate at MIT (Aravind Padmanabhan) and resulted in the successful design and fabrication a floating element shear sensor. The sensor has been demonstrated to be the most sensitive and accurate MEMS shear sensor developed to date.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
May 15, 1997
Accession Number
ADA326190

Entities

People

  • Kenneth S. Breuer
  • Martin A. Schmidt

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Sensors

DTIC Thesaurus Topics

  • Boundary Layer
  • Chemistry
  • Computational Fluid Dynamics
  • Electronics Laboratories
  • Energy Bands
  • Fluid Dynamics
  • Fluid Flow
  • Mechanical Properties
  • Mechanics
  • Micro-Machines
  • Microelectromechanical Systems
  • Modulus Of Elasticity
  • Pressure Distribution
  • Semiconductors
  • Standing Waves
  • Stratified Fluids
  • Two Dimensional

Readers

  • Fluid Dynamics.
  • Integrated Circuit Design and Technology.
  • Technical Research and Report Writing.