Growth and Structure of MBE-Deposited Iridium Silicide.
Abstract
We were able to form pure Tr-Si3 films at temperatures as low as 450 deg C, which is almost 200 deg C lower than previously reported. With our MBE growth techniques we also found a previously-unreported c-axis epitaxial IrSi3 growth mode at 700 deg C, found that the IrSi3 epitaxy on Si (111) was dominated by a Mode B orientation which had not previously been reported in the literature, as well as showed that the epitaxial growth of IrSe3 on was superior to that on Si(100).
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 01, 1996
- Accession Number
- ADA326192
Entities
People
- Charles M. Falco