Micro-Opto-Mechanical Systems.
Abstract
We have finished a three year university/industry cooperative program for basic research and technology development in the area of microoptomechanical systems (MOMS). The impetus of this work came from the results of our research on microactuators as well as a review of other current research. Our program addressed two components: (1) the development of basic microoptomechanical devices which can be combined in to complex MOMS; and (2) the development of the basic processes necessary for the fabrication of these devices. The ultimate goal of this project was the development Microoptomechanical Systems (MOMS) which integrate the coordinated motions of basic microactuators, passive/active optical components, microsensors, and microelectronics in order to realize complete pre-assembled optical systems that can be mass produced at low unit cost. Such microfabricated MOMS: (1) do not need component alignment; (2) can be mass produced; (3) have high packing density; (4) can be directly integrated with electronics; and (5) should be low power, small, and light weight. We used microactuator technology to develop a family of basic microoptomechanical devices which can be utilized individually or in combination to fabricate miniature optical scanners for a variety of applications, optical interconnect switches and frequency controlled laser diodes for telecommunications and computers as examples which we have completed in this program.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 08, 1997
- Accession Number
- ADA326245
Entities
People
- Kaigham J. Gabriel
Organizations
- Case Western Reserve University