Particulate Contaminant Formation and Transport in Microelectronic Manufacturing Processes. Phase II.

Abstract

This is the fifth quarterly report documenting the work performed during a two year Phase II STTR activity entitled 'Particulate contaminant formation and transport in microelectronic manufacturing processes.' The overall objective is to produce a charging, transport, and growth simulation (CTGS) tool that can be used effectively by equipment manufacturers and users to reduce particle generation in fabrication systems.

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Document Details

Document Type
Technical Report
Publication Date
May 01, 1997
Accession Number
ADA326535

Entities

People

  • Anantha Krishnan
  • Mark J. Kushnet
  • N. P. Rao
  • Phillip J. Stout
  • Steven L. Girshick

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Charge Carriers
  • Chemical Reactions
  • Chemistry
  • Computational Fluid Dynamics
  • Dynamics
  • Environmental Pollutants
  • Fabrication
  • Flow
  • Fluid Dynamics
  • Fluid Flow
  • Graphical User Interface
  • Heat Energy
  • Particles
  • Phase
  • Semiconductor Devices
  • Thermodynamic Properties
  • User Interface

Readers

  • Aerosol Science/Aerosol Physics
  • Integrated Circuit Design and Technology.
  • Technical Research and Report Writing.

Technology Areas

  • Microelectronics