Electron Specimen Interaction in Low Voltage Electron Beam Lithography,

Abstract

Enclosed are a number of monthly technical reports from July to October 95. A great deal of effort is devoted to investigation and designing of photocathode activation chamber, electron gun, electron beam analysis chamber.

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Document Details

Document Type
Technical Report
Publication Date
Jul 01, 1995
Accession Number
ADA327202

Entities

People

  • Weidong Liu

Organizations

  • Oregon State University

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Bulk Materials
  • Chromium
  • Construction
  • Detectors
  • Electron Beam Lithography
  • Electron Beams
  • Electron Emission
  • Electron Energy
  • Electron Guns
  • Electron Optics
  • Electrons
  • Emission
  • Low Voltage
  • Materials
  • Monte Carlo Method
  • Optics
  • Simulations

Fields of Study

  • Physics

Readers

  • Pulsed Power and Plasma Physics.
  • Technical Research and Report Writing.
  • Thermal Physics or Thermal Science.

Technology Areas

  • Directed Energy
  • Microelectronics