X-Ray Photoelectron Spectroscopy Study of Radiofrequency-Sputtered Titanium Carbide, Molybdenum Carbide, and Titanium Boride Coatings and Their Friction Properties.

Abstract

Radiofrequency (rf) sputtered coatings of titanium carbide (TiC), molybdenum carbide (Mo2C) and titanium boride (TiB2) were tested as wear resistant coatings on 440-C stainless steel in a pin on disk apparatus. X-ray photoelectron spectroscopy (XPS) was used to analyze the sputtered films with regard to both bulk and interface composition in order to obtain maximum film performance. Significant improvements in friction behavior were obtained when properly biased films were deposited on deliberately preoxidized substrates. XPS depth profile data showed thick graded interfaces (>2500 A) for bias deposited films even when adherence is poor. The addition of 10 percent hydrogen to the sputtering gas produced coatings with Thin poorly adherent interfaces. The results suggest that some of the common practices in the field of sputtering may be detrimental to achieving maximum adherence and optimum composition for these refractory compounds.

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Document Details

Document Type
Technical Report
Publication Date
Oct 01, 1977
Accession Number
ADA329422

Entities

People

  • Donald R. Wheeler
  • William A. Brainard

Organizations

  • Glenn Research Center

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Adhesion
  • Ceramic Materials
  • Chemistry
  • Coatings
  • Electron Energy
  • Electrons
  • Films
  • Friction
  • Materials
  • Measurement
  • Mechanical Properties
  • Metal Oxides
  • Oxide Films
  • Oxides
  • Stainless Steel
  • X Ray Photoelectron Spectroscopy
  • X Rays

Fields of Study

  • Materials science

Readers

  • Surface Engineering/Surface Coating Technology.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene