Plasma Treatment of Surfaces and Plasma Enhanced Deposition.
Abstract
This report results from a contract tasking Eindhoven University of Technology as follows: The contractor will investigate the plasma treatment of surfaces and plasma enhanced deposition using EUT's cascade arc source as the basis for this effort.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 1997
- Accession Number
- ADA329577
Entities
People
- Daniel Schram
Organizations
- Eindhoven University of Technology