Silicon Optical Data Link.
Abstract
This Silicon Optical Data Link Program was initiated as a three year effort to develop an monolithically integrated data link using standard silicon fabrication technology. The objectives were to create efficient emitter, waveguide and detector components, integrate the process sequence and demonstrate functionality. The program was prematurely terminated by AFOSR with approximately 50% of the anticipated support awarded. The results enabled by this grant, however, were quite significant. A process for increasing the light output from Si:Er LEDs by greater than 100-fold was demonstrated using UHV-CVD deposition. Our world record transmission through polycrystalline silicon waveguides at a wavelength of 1.54 microns was enhanced by more than two orders of magnitude by passivation of grain boundary defects. The smallest ever waveguide bends and 3dB splitters were fabricated and tested to show low loss. The responsivity of SiGe photodetectors was extended to 1.4 microns by employing bandgap reduction effects of alloying and strain. A key integration issue related to surface roughening by dislocation pile-up in misfit heterostructures was solved and a patent application was submitted. A discrete optical data link was fabricated and analog voice transmission using silicon photons was demonstrated for the first time.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 1997
- Accession Number
- ADA329587
Entities
People
- Lionel C. Kimerling
Organizations
- Massachusetts Institute of Technology