A Nano-Modulated Ceramic Coating Deposition System.

Abstract

This report outlines the design, construction, and implementation of a Nano-modulated ceramic coating deposition system. The deposition system was designed to deposit multilayer (superlattice) coatings of two or more oxide or other non-conducting materials. The system has two cathodes opposed to each other with their magnetic fields forming a closed loop, which enhances the current into the substrate. The deposition system takes advantage of the latest developments in vacuum and characterization technologies to ensure a repeatable process. It is equipped with cryopumps on the main chamber and the load lock for fast pumpdown and minimization of system contamination. Peripheral equipment includes an rf plasma probe for determination in real time of the plasma impedance, and an in-situ ellipsometer for real time characterization of one of the films making up the superlattice.

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Document Details

Document Type
Technical Report
Publication Date
Oct 31, 1996
Accession Number
ADA329768

Entities

People

  • Anthony R. Lefkow
  • William D. Sproul

Organizations

  • Northwestern University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • Base Pressure
  • Ceramic Coatings
  • Coatings
  • Control Systems
  • Ellipsometers
  • Gate Valves
  • Ionization Gages
  • Materials
  • Materials Science
  • Measurement
  • Power Supplies
  • Pressure Measurement
  • Substrates
  • Superlattices
  • Telemetry Equipment
  • Wear Resistance

Fields of Study

  • Materials science

Readers

  • Computer Science/Computer Engineering/Data Science/Digital Signal Processing.
  • Electrical Engineering
  • Thin Film Deposition Science.