Particulate Contaminant Formation and Transport in Microelectronic Manufacturing Processes. Phase 2.
Abstract
This is the seventh quarterly report documenting the work performed during a two year Phase II STTR activity entitled "Particulate contaminant formation and transport in microelectronic manufacturing processes." The overall objective is to produce a charging, transport, and growth simulation (CTGS) tool that can be used effectively by equipment manufacturers and users to reduce particle generation in fabrication systems. The project includes collaborations with Prof. Steven Girshick (University of Minnesota) on ion induced nucleation and Prof. Mark J. Kushner (University of Illinois) on particle charging and transport.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 1997
- Accession Number
- ADA332382
Entities
People
- Aishwarya Krishnan
- M. J. Kushner
- N. P. Rao
- P. J. Stout
- S. L. Girshick