Laterally Defined Nanoscale Structures: Film Growth, Chemistry, and Transport
Abstract
This final technical report for AFOSR Grant No. F49620-94-1-0113, entitled Laterally Defined Nanoscale Structures: Film Growth, Chemistry, and Transport, summarizes the work performed on this grant. The research aims were to investigate film growth, chemistry, and electronic and atomic transport on laterally defined nanostructures. The objective of this research was to develop methodologies for creating nanoscale patterns in surfaces using scanned-probe techniques, either through assembly of molecules on surfaces or by the removal of atoms or molecules from an existing structure. Because of initial success in our laboratories in increasing the speed of operation of scanned probes, the emphasis changed in the last 1-1/2 years to explorations of the viability of high-speed parallel nanolithography for creating patterns.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 01, 1997
- Accession Number
- ADA334742
Entities
People
- Max G. Lagally
Organizations
- University of Wisconsin–Madison