JPRS Report, Science & Technology, Japan, Polymers for Microelectronics.

Abstract

POLYMERS FOR MICROELECTRONICS Selected abstracts from PME '89 POLYMERS FOR MICROELECTRONICS held 29 Oct - 2 Nov 89 in Tokyo, sponsored by the Japan Society of Radiation Chemistry and cosponsored by the Japan Society of Polymer Science and the Chemical Society of Japan

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Document Details

Document Type
Technical Report
Publication Date
Jan 16, 1990
Accession Number
ADA335574

Entities

Organizations

  • Joint Publications Research Service

Tags

DTIC Thesaurus Topics

  • Chemical Reactants
  • Chemical Reaction Properties
  • Chemical Reactions
  • Chemical Synthesis
  • Chemistry
  • Dielectrics
  • Electron Beam Lithography
  • Manufacturing
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Mechanical Working
  • Organic Chemistry
  • Photolithography
  • Polymeric Films
  • Printing
  • Resins

Fields of Study

  • Chemistry
  • Physics

Readers

  • Academic Conference Management
  • Polymer Science and Technology

Technology Areas

  • Microelectronics