DURIP Proposal for An Ion-Assisted Sputtering Deposition System for Nano-Modulated Oxide Coatings

Abstract

Major requisitions include a four-target RF sputtering system from Denton Vacuum Industry and a scanning probe microscope system from AutoProbe Inc. Using these instruments, oxide thin films of various compositions and heterostructures have been prepared to investigate the phenomenon of fatigue. It was found that the rate of degradation is sensitive to the type of charge carriers. Electrons accelerate fatigue while holes do not. It was also found that fatigue has a strong frequency dependence. This is best characterized by monitoring the increase of coercive field as a function of frequency after fatigue. The latter phenomenon has been modeled using interface dynamics involving bow-out and defect trapping.

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Document Details

Document Type
Technical Report
Publication Date
Jan 21, 1998
Accession Number
ADA336396

Entities

People

  • I-wei Chen

Organizations

  • University of Michigan

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • Charge Carriers
  • Degradation
  • Dynamics
  • Electronic Equipment
  • Electrons
  • Engineering
  • Films
  • Frequency
  • Heterojunctions
  • Materials
  • Materials Science
  • Michigan
  • Monitoring
  • Sputtering
  • Thin Films

Fields of Study

  • Physics

Readers

  • Research Science/Academic Research
  • Structural Health Monitoring of Composite Structures.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene