Nanocrystalline Processing and Interface Engineering of Nitrides
Abstract
This report describes the preliminary results obtained in the study of a forced-flow reactor to synthesize nanocrystalline aluminum nitride. Variables such as starting material and the use of a nitriding plasma were examined. It was found that evaporating aluminum, rather than aluminum nitride, resulted in higher yields of material but with a higher level of unnitrided aluminum nanocrystals. The use of a microwave plasma is found to be critical to obtain high levels of nitridation. Future research includes post-nitridation of the nanocrystalline aluminum, and densification and evaluation of the nanocrystalline aluminum nitride.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 31, 1997
- Accession Number
- ADA336657
Entities
People
- Jackie Y. Ying
- Martin L. Panchula
Organizations
- Massachusetts Institute of Technology