(AASERT 94) Intelligent Control of Materials Processes

Abstract

A systematic set of experiments has been performed to determine the effect of temperature, oxygen, precursor composition, and precursor flow rate on the gas phase of chemical vapor deposition.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1998
Accession Number
ADA337453

Entities

People

  • Patrick H. Garrett

Organizations

  • University of Cincinnati

Tags

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Engineering
  • Flow Rate
  • Fuzzy Logic
  • Heat Treatment
  • Information Operations
  • Ionization Gages
  • Maintenance
  • Mass Spectrometers
  • Materials
  • Pneumatic Valves
  • Power Supplies
  • Precursors
  • Preventive Maintenance
  • Spectrometers
  • Vacuum
  • Vapor Deposition

Fields of Study

  • Chemistry

Readers

  • Combustion and Flow Dynamics.
  • Materials Science and Engineering.
  • Research Science/Academic Research