Silicon Micromechanical Optical Waveguide for Modulation and Sensing

Abstract

The microstructure, optical and mechanical properties of the silicon micromechanical optical waveguide are investigated. The physical principles of mechanical excitation of the cantilever waveguide by photothermal, magnetostriction, and by direct force action are considered. The sensor application of the developed device is analyzed.

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Document Details

Document Type
Technical Report
Publication Date
Oct 12, 1995
Accession Number
ADA339091

Entities

People

  • A. V. Churenkov

Organizations

  • Moscow Institute of Physics and Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Cantilever Beams
  • Detectors
  • Electron Microscopes
  • Fabrication
  • Integrated Circuits
  • Laser Diodes
  • Lasers
  • Mechanical Properties
  • Modulation
  • Modulators
  • Optical Fibers
  • Optical Modulators
  • Optical Properties
  • Optical Waveguides
  • Optics
  • Semiconductors
  • Waveguides

Fields of Study

  • Physics

Readers

  • Materials Science and Engineering.
  • Structural Dynamics.