High Temperature Superconductor MCM Process Development

Abstract

Two types of high-temperature superconducting (HTS) multichip modules (MCMs) utilizing yttrium-barium-copper oxide (YBCO) as the superconductor, were developed under this grant. The first was a "flip mesh" MCM, in which two superconducting layers, one containing X-running and one Y-running wire segments, were fabricated on separate substrates and joined in a manner similar to flip chips. The second module was a monolithic MCM, again using layers of X- and Y-running conductors, but patterned on a single substrate, with a thick layer of SiO2 serving as interlayer dielectric. Deposition of the second superconducting (YBCO) layer was effected by the use of an ion beam-assisted deposition (IBAD) buffer layer.

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Document Details

Document Type
Technical Report
Publication Date
Mar 18, 1998
Accession Number
ADA339986

Entities

People

  • Leonard W. Schaper

Organizations

  • University of Arkansas

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • Ceramic Materials
  • Chemistry
  • Coatings
  • Crystal Structure
  • Deposition (Materials Processing)
  • Dielectrics
  • Gamma Rays
  • High Temperature Superconductors
  • Manufacturing
  • Material Degradation Processes
  • Materials
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Military Research
  • Transition Temperature

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Superconducting Magnet Technology
  • Thin Film Deposition Science.