Nonlinear Optical Polymer Thin Film for the Inspection of Sub-Micrometer Electronic Circuits.

Abstract

Nonlinear optical properties of thin-film polymers are used, together with high spatial resolution of near-field optical microscopy, to create a novel diagnostic instrument for testing VLSI and ULSI integrated circuits (ICs). The instrument performs noninvasive measurements of the electric field generated by sub-micrometer size devices on ICs. Sub-micrometer spatial resolution, and sub-picosecond temporal resolution are both feasible. The instrument is capable of sensing extremely large bandwidth signals from a device within an IC, as well as generating a spatially distributed map of the electric field radiated by the circuit. The instrument is expected to fill a critical need in the areas of circuit design, reliability studies of integrated circuits, multi-chip modules and flat panel displays, and in production quality control.

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Document Details

Document Type
Technical Report
Publication Date
Apr 07, 1998
Accession Number
ADA341649

Entities

People

  • Pajo Vujkovic-cvijin

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Circuits
  • Electric Fields
  • Electronic Circuits
  • Far Field
  • Films
  • Integrated Circuits
  • Materials
  • Measurement
  • Micrometers
  • Near Field
  • Optical Phenomena
  • Optical Properties
  • Quality Control
  • Semiconductor Devices
  • Semiconductors
  • Thin Films
  • Very Large Scale Integration

Fields of Study

  • Physics

Readers

  • Human-Computer Interaction (HCI).
  • Integrated Circuit Design and Technology.
  • Optical Physics and Photonics.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems