Federal Research: SEMATECH's Efforts to Develop and Transfer Manufacturing Technology

Abstract

SEMATECH primarily has focused on strengthening critical segments of the U.S. semiconductor equipment industry by working with individual suppliers on projects to improve the performance of their equipment. SEMATECH has given priority to projects in lithography; multilevel metals; manufacturing methods, processes, and systems; and furnaces and ion implantation. As of February 7,1991, SEMATECH had completed 9 projects and had 54 underway.

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Document Details

Document Type
Technical Report
Publication Date
May 01, 1991
Accession Number
ADA344783

Entities

Organizations

  • United States Government Accountability Office

Tags

DTIC Thesaurus Topics

  • Corporations
  • Economic Development
  • Executives
  • Fabrication
  • Governments
  • High Voltage
  • House Of Representatives
  • Ion Implantation
  • Lithography
  • Manufacturing
  • Materials
  • Photolithography
  • Semiconductor Manufacturing
  • Semiconductors
  • Standards
  • Technology Transfer
  • United States

Readers

  • Defense Technology Research and Development.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics