JPRS Report, Science and Technology: Japan. ULSI Process Technology Symposium.

Abstract

This document presents selected papers presented at the 89 ULSI Process Technology Symposium held 7-8 Dec 88 in Tokyo, sponsored by Science Forum Co., Ltd. Topics include semiconductors, lithographic technology, etching technology, and process technology.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Sep 18, 1989
Accession Number
ADA347647

Entities

Organizations

  • Joint Publications Research Service

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Accuracy
  • Aspect Ratio
  • Chemical Vapor Deposition
  • Chemistry
  • Excimer Lasers
  • Fabrication
  • Low Temperature
  • Manufacturing
  • Mass Production
  • Materials
  • Measurement
  • Semiconductor Devices
  • Semiconductors
  • Thin Films
  • Transistors
  • X Ray Lithography
  • X Rays

Readers

  • Academic Conference Management
  • Nanofabrication and Microfabrication.

Technology Areas

  • Microelectronics