Investigations of the Temperature and Concentration Dependencies of ESR Spectrum of Residual Donors in N-Type Bulk 6H SiC

Abstract

This report results from a contract tasking Institute of Semiconductor Physics as follows: The contractor will investigate the ESR spectra of n-type 6H SiC over wide temperature and concentration ranges to establish the number of residual donors inherent in the 6H SiC polytype and their energy characteristics.

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Document Details

Document Type
Technical Report
Publication Date
Jun 05, 1998
Accession Number
ADA348945

Entities

People

  • Ekaterina Kalabukhova

Organizations

  • National Academy of Sciences of Ukraine

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Air Force
  • Band Gaps
  • Ceramic Materials
  • Electron Spin Resonance
  • Energy Bands
  • Energy Levels
  • High Temperature
  • Intensity
  • Low Temperature
  • Materials
  • Residuals
  • Resonance
  • Semiconductor Physics
  • Semiconductors
  • Silicon Carbide
  • Spectra
  • Spin Resonance

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology
  • Technical Research and Report Writing.

Technology Areas

  • Microelectronics