Tribology Issues and Opportunities in MEMS Workshop
Abstract
The objective of this workshop was to bring together researchers, manufacturers and potential users of MEMS and experts in tribology (including mechanics, mechanical properties and surface modification) so that the MEMS community could better understand the tribology expertise and the tribology community could better understand the major problems on hand and identify critical research issues facing MEMS industry. There were three specific objectives of the workshop. The first was to provide tutorials on MEMS technology and state of the art of tribology for education of tribology and MEMS community, respectively. The second objective was to share whatever tribological understanding of MEMS devices exists. The third objective was to identify tribology research issues and opportunities and general directions for tribology in MEMS research which were accomplished via breakout sessions and a panel discussion. Since the objective of the first part of the workshop was to provide tutorials, we had a large number of lectures of short durations followed by lectures on tribology of MEMS, mechanical property measurements, modification and characterization of surfaces, and breakout sessions and a panel discussion. A side benefit of this workshop was to bring macro and microtribologists together.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1998
- Accession Number
- ADA349640
Entities
People
- Bharat Bhushan
Organizations
- Ohio State University