SIMOX Evaluation Program
Abstract
The equipment bought under this project is used to study the reliability of devices fabricated on SIMOX substrates. SIMOX (separation-by-implantation-of-oxygen) material is used primarily for low power IC application. The reliability of devices fabricated on SIMOX substrates is influenced by oxide degradation due to charge trapping, interface state generation, and bulk trap generation in SIMOX.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 14, 1998
- Accession Number
- ADA351608
Entities
People
- Tarak Bhar