SIMOX Evaluation Program

Abstract

The equipment bought under this project is used to study the reliability of devices fabricated on SIMOX substrates. SIMOX (separation-by-implantation-of-oxygen) material is used primarily for low power IC application. The reliability of devices fabricated on SIMOX substrates is influenced by oxide degradation due to charge trapping, interface state generation, and bulk trap generation in SIMOX.

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Document Details

Document Type
Technical Report
Publication Date
Mar 14, 1998
Accession Number
ADA351608

Entities

People

  • Tarak Bhar

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Abstracts
  • Air Force
  • Air Force Facilities
  • Amplifiers
  • Computers
  • Connecticut
  • Demographic Cohorts
  • District Of Columbia
  • Governments
  • High Voltage
  • Low Noise
  • Reliability
  • Scientific Research
  • Substrates
  • Test And Evaluation
  • Universities
  • Voltage Amplifiers

Fields of Study

  • Engineering

Readers

  • Semiconductor Device Technology
  • Systems Analysis and Design