Characterization of Diamond Film Growth in a Combustion Flame
Abstract
Significant progress has been made in producing large area, heteroepitaxial diamond films. Work has been directed at heteroepitaxial nucleation of diamond on nickel in a hot-filament chemical vapor deposition (CVD) reactor; and high rate, textured growth in a flat flame acetylene combustion reactor. In addition, a detailed kinetic model of the combustion reactor has been developed and validated by gas microprobe sampling. Comparisons of model predictions and experimental observations of growth rate and morphology have been used to develop a lull understanding of the deposition process. Future studies will begin examining dopant effects on the diamond nucleation and growth process.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 22, 1998
- Accession Number
- ADA358181
Entities
People
- John T. Prater
Organizations
- North Carolina State University