Novel Micromechanical Tunneling Structures for Sensor Applications
Abstract
Electrostatically controlled micro-cantilevers with integrated tunnel junctions can form the basis of a number of interesting devices with sensor applications. Use of a tunnel junction provides an extremely sensitive way to sense the cantilever position. In its simplest form the device can be used as a high gain, extremely low power amplifier. If the cantilever were fabricated from a bimetallic strip, it becomes a temperature sensor suitable for use as an pixel element in an infrared focal plane array. Other potential applications include acoustic and seismic sensing. Preliminary cantilever fabrication results will be presented.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1998
- Accession Number
- ADA358681
Entities
People
- A. Dana
- M. A. Mccord
- Roger Fabian W. Pease
Organizations
- Stanford University