JPRS Report, Science & Technology, Japan, Semi Technology Symposium 90

Abstract

The report documented selected abstracted articles presented at the SEMI technology held 22-24 Oct 90 in China, Japan, sponsored by Semiconductor Materials International. The purpose of the present report was to address both basic and applied research issues regarding science and technology in Japan with particular attention to lithography, etching technology, microelectronics and solid state physics. It is expected the innovative experimental research and design standards presented in the report will play an important role in the future economic growth in Japan.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
May 17, 1991
Accession Number
ADA359105

Entities

Organizations

  • Joint Publications Research Service

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies
  • Ground and Sea Platforms

DTIC Thesaurus Topics

  • Birds
  • Chemical Synthesis
  • Chemical Vapor Deposition
  • Chemistry
  • Construction
  • Fabrication
  • Manufacturing
  • Material Degradation Processes
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Mechanics
  • Photolithography
  • Semiconductor Devices
  • Semiconductors
  • Surface Finishing
  • Three Dimensional

Readers

  • Academic Conference Management
  • Asian Economic Studies
  • Systems Analysis and Design

Technology Areas

  • Microelectronics