Advanced Synthesis of Carbon Nitride

Abstract

Thin films composed of carbon and nitrogen were generated on a variety of substrates by deposition of radicals obtained after dissociation of gaseous cyanogen azide or solid cyanuric triazide (CTA). These intermediates were obtained upon reacting cyanogen halides or cyanuric chloride, respectively, with sodium azide. The CTA was chemically pure, whereas the gaseous azides were contaminated by halogens that were difficult to safely remove. Energy transfer from discharged nitrogen in a low-pressure flowtube reactor was used to dissociate cyanogen azide and ultraviolet photolysis was employed at ambient pressure to dissociate CTA. Films generated at low pressure demonstrated a bandgap of 2.6 eV with a 2.3 refractive index at visible wavelength. X-ray photoelectron spectroscopy showed the films to consist of near equal yields of diamond-like carbon and a phase with carbon nitride stoichiometry. Films from both donors demonstrated absorption bands in the infrared that peaked at 1600 and 3150 wave numbers. Film adhesion was best on silicon carbide and aluminum nitride, on substrates that were heated during deposition, and when made from CTA. Deposition onto silicon carbide or aluminum nitride at 360 deg C yielded crystalline films with x-ray diffraction peaks that precisely matched the known ultrahard beta-phase of carbon nitride.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1998
Accession Number
ADA359222

Entities

People

  • D. J. Benard

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Ceramic Materials
  • Chemical Reaction Properties
  • Chemical Reactions
  • Chemical Synthesis
  • Chemistry
  • Compound Semiconductors
  • Cyanides
  • Decomposition
  • Diffraction
  • Energy Transfer
  • Materials
  • Materials Laboratories
  • Measurement
  • Refractive Index
  • Silicon Carbide
  • Spectra
  • Spectroscopy

Readers

  • Molecular Photonics/Laser Physics
  • Nanocomposite Materials Science
  • Powder metallurgy of Titanium alloys.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene