Separation of Carrier Lifetime from Interface Recombination Velocity
Abstract
The semiconductor manufacturing industry always needs faster, non-invasive means to establish the electrical quality of wafers and processes. Methods to measure and map the quality of full wafers on a routine basis permits faster feedback and identification of problems. Such techniques form a growing part of the statistical Quality Control/Quality Assessment (QC/QA) algorithms of the modern manufacturing process.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 01, 1997
- Accession Number
- ADA360748
Entities
People
- John L. Freeouf