Mechanical and Microstructural Evaluation of Barium Strontium Titanate Thin Films for Improved Antenna Performance and Reliability

Abstract

Ferroelectric barium strontium titanate (Ba(1-x)SrxTiO3 BSTO) films of 1-micron nominal thickness were deposited on single crystals of sapphire and electroded substrates at substrate temperatures varying from 30 deg C to 700 deg C. The microstructure of the thin films was columnar at all substrate deposition temperatures. The film microhardness showed a trend toward increased hardness with substrate temperature. Furthermore, with the elevation in substrate temperature, there was a parallel increase in film-substrate adhesion measurements, while the cohesion measurements were not influenced by substrate temperature.

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Document Details

Document Type
Technical Report
Publication Date
Apr 01, 1999
Accession Number
ADA361481

Entities

People

  • C. G. Fountzoulas
  • C. W. Hubbard
  • Melanie W. Cole
  • Surojeet Sengupta

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Adhesion
  • Barium Strontium Titanates
  • Cohesion
  • Electron Microscopes
  • Electron Microscopy
  • Films
  • Hardness
  • Materials
  • Measurement
  • Mechanical Properties
  • Microhardness
  • Physical Properties
  • Reliability
  • Strontium
  • Substrates
  • Test And Evaluation
  • Thin Films

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Surface Engineering/Surface Coating Technology.