Mechanical and Microstructural Evaluation of Barium Strontium Titanate Thin Films for Improved Antenna Performance and Reliability
Abstract
Ferroelectric barium strontium titanate (Ba(1-x)SrxTiO3 BSTO) films of 1-micron nominal thickness were deposited on single crystals of sapphire and electroded substrates at substrate temperatures varying from 30 deg C to 700 deg C. The microstructure of the thin films was columnar at all substrate deposition temperatures. The film microhardness showed a trend toward increased hardness with substrate temperature. Furthermore, with the elevation in substrate temperature, there was a parallel increase in film-substrate adhesion measurements, while the cohesion measurements were not influenced by substrate temperature.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1999
- Accession Number
- ADA361481
Entities
People
- C. G. Fountzoulas
- C. W. Hubbard
- Melanie W. Cole
- Surojeet Sengupta
Organizations
- United States Army Research Laboratory