Contributive Research & Development Volume 130: The Role of Mechanics in Microelectromechanical Systems (MEMS) Technology

Abstract

This report presents a review of recent developments in experimental and theoretical studies of the mechanical behavior of polycrystalline silicon for microelectromechanical systems (MEMS), and defines research needs to predict the life and strength of MEMS devices.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Oct 01, 1998
Accession Number
ADA361501

Entities

People

  • Roberto Ballarini

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Composite Materials
  • Computational Science
  • Databases
  • Elastic Properties
  • Fabrication
  • Manufacturing
  • Materials
  • Materials Testing
  • Mechanical Engineering
  • Mechanical Properties
  • Mechanical Working
  • Mechanics
  • Microelectromechanical Systems
  • Modulus Of Elasticity
  • Monte Carlo Method
  • Strain Gages
  • Stress Strain Relations

Readers

  • Emergency Management and Homeland Security.
  • Reinforced Composite Materials
  • Technical Research and Report Writing.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems