Materials Research Society Symposium Proceedigns, Volume 495. Chemical Aspects of Electronic Ceramics Processing.
Abstract
This volume contains 65 papers from a symposium entitled "Chemical Aspects of Electronic Ceramics Processing," held over four days at the 1997 MRS ?all Meeting in Boston. This symposium is the "merger" of two previously held symposia, "Non- Oxide Ceramics" and "Metal Organic Chemical Vapor Deposition of Electronic Ceramics," both held twice before in the Fall of 1993 and the l"all of 1995. The considerable overlap, between the two symposia, especially in the area of chemical vapor deposition of non-oxide electronic ceramics, suggested that combining the two would attract a wider audience without unduly sacrificing the focus of the symposium. The common themes in all of the research presented in this volume are the creative use of chemistry principles for ceramic fabrication and a multidisciplinary approach to materials research. Inorganic chemistry, solid-state chemistry, chemical engineering, materials science and engineering, and electrical engineering have all been skillfully combined to produce materials which will play an increasingly more important part in our lives. As in prior years, chemical vapor deposition (CVD) continues to be a popular area of research and was the subject of approximately half of the papers in this volume. Farticularly "hot" areas of research are new and improved precursors, delivery systems for low-vapor pressure precursors, and improved processing and materials properties. ?apers are evenly divided between oxide ceramics and non- oxide ceramics.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 04, 1997
- Accession Number
- ADA365155
Entities
People
- Aloysius F. Hepp
- Barry Arkles
- David B. Beach
- John J. Sullivan
- Parshant N. Kumta
Organizations
- Materials Research Society