Semiconducting Diamond for Electronic Applications

Abstract

This research work aims at fabricating high-quality polycrystalline diamond thin films and at doping these films with Li/Na in order to obtain n-type semiconducting behavior. A hot filament chemical vapor deposition reactor is employed to deposit polycrystalline diamond films. We have successfully interfaced a spectroscopic ellipsometer to our chemical vapor deposition (CVD) system for the in situ monitoring of the diamond film deposition process. We have also interfaced our CVD to the emission. A study of the parameter space is underway in order to determine the optimum deposition window.

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Document Details

Document Type
Technical Report
Publication Date
Apr 30, 1999
Accession Number
ADA369527

Entities

People

  • Gerardo Morell

Organizations

  • University of Puerto Rico

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Chemical Vapor Deposition
  • Chemistry
  • Coatings
  • Cyclotron Resonance
  • Department Of Defense
  • Diamond Films
  • Emission
  • Films
  • Infrared Spectroscopy
  • Low Temperature
  • Materials
  • Measurement
  • Microstructure
  • Puerto Rico
  • Thin Films
  • Vapor Deposition

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Space