Selective Processing Techniques for Electronic and Optoelectronic Applications: Quantum-Well Devices and Integrated Optic Circuits
Abstract
This program had two objectives: to develop selective material processing techniques for both multiple quantum well (MQW) electronic devices and circuits, and to develop design and fabrication techniques for advanced photonic devices and circuits. The ULTRA electronics portion of the program was focused on developing new damage free etching techniques for nanoscale semiconductor electronic devices; techniques primarily for III-V semiconductors were of interest. The photonics program considered a wide range of materials for photonic integrated devices (PICs) with an emphasis on prototyping methods and novel devices. The successes of the program included new integrated devices, laser prototyping techniques, new design software, and a new fabrication method for single crystal metal oxides. Technology transfer was realized to two industrial partners.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 22, 1999
- Accession Number
- ADA369792
Entities
People
- Richard M. Osgood, Jr.
Organizations
- Columbia University