High Resolution Medium Energy Ion Beam Analysis and Processing of Ultra-Thin Films

Abstract

Medium energy time-of-flight spectrometry has been optimized for high resolution depth profiling of ultra-thin films. This report reviews the technical accomplishments of the project and discusses applications of the analytical technique to problems in semiconductor processing, trace element analysis, and organic thin film research.

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Document Details

Document Type
Technical Report
Publication Date
Sep 15, 1999
Accession Number
ADA369971

Entities

People

  • Robert A. Weller

Organizations

  • Vanderbilt University

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Chemical Compounds
  • Chemical Synthesis
  • Chemistry
  • Computational Fluid Dynamics
  • Computational Science
  • Electronic Mail
  • Geometry
  • Ions
  • Mass Spectrometry
  • Materials
  • Materials Processing
  • Materials Science
  • Optics
  • Semiconductors
  • Spectra
  • Spectrometry
  • Two Dimensional

Fields of Study

  • Physics

Readers

  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Technical Research and Report Writing.
  • Wave Propagation and Nonlinear Chaotic Dynamics.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene