Proceedings of the Biennial Conference (11th) on Insulating Films on Semiconductors Held in Kloster Banz, Germany on June 16-19, 1999 (Microeletronic Engineering, Volume 48, No. 1-4, September 1999)
Abstract
The Final Proceedings for Insulating Films on Semiconductors, 16 June 1999 - 19 June 1999. This is an interdisciplinary conference. Topics include dielectrics, semiconductor/insulator interfaces, and the physics and technology of field effect (MIS, MOS) semiconductor devices, atomic scale processing, characterization and measurement techniques, radiation and hot carrier reliability, novel materials, and processing technologies. Special emphasis will be given to ultra thin oxides on silicon.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 01, 1999
- Accession Number
- ADA370926
Entities
People
- Max Schulz
- Rolf Brendel