Proceedings of the Biennial Conference (11th) on Insulating Films on Semiconductors Held in Kloster Banz, Germany on June 16-19, 1999 (Microeletronic Engineering, Volume 48, No. 1-4, September 1999)

Abstract

The Final Proceedings for Insulating Films on Semiconductors, 16 June 1999 - 19 June 1999. This is an interdisciplinary conference. Topics include dielectrics, semiconductor/insulator interfaces, and the physics and technology of field effect (MIS, MOS) semiconductor devices, atomic scale processing, characterization and measurement techniques, radiation and hot carrier reliability, novel materials, and processing technologies. Special emphasis will be given to ultra thin oxides on silicon.

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1999
Accession Number
ADA370926

Entities

People

  • Max Schulz
  • Rolf Brendel

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Synthesis
  • Chemical Vapor Deposition
  • Chemistry
  • Crystal Lattice Vibrations
  • Electromagnetic Fields
  • Electronics Industry
  • Electronics Laboratories
  • Material Degradation Processes
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Materials Testing
  • Modules (Electronics)
  • Power Electronics
  • Semiconductor Devices
  • Semiconductors
  • Silicon Carbide

Fields of Study

  • Physics

Readers

  • Academic Conference Management
  • Nanofabrication and Microfabrication.
  • Thermal Physics or Thermal Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene