Laser Applications in Microelectronic and Optoelectronic Manufacturing IV

Abstract

This proceedings contains papers on the following topics: Laser Nanotechnology; Fundamental Processes and Diagnostics of Laser Ablation; Ultrashort Pulse Laser Processing; Laser-induced Modification of Surface and Subsurface Properties of Materials; Innovative Laser Technology for Industrial Applications; Laser Surface Cleaning and Crystallization; Laser Microfabrication and Micromachining; Novel Methods and New Tools for Photon Processing; Pulsed Laser Deposition, Nanoclusters, Trybological and Diamond Films.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jul 15, 1999
Accession Number
ADA372739

Entities

People

  • Ernst W. Kreufz
  • Henry Helvajian
  • Jan J. Dubowski
  • Koji Sugioka

Organizations

  • SPIE

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Chemical Synthesis
  • Chemistry
  • Frequency Combs
  • Klystrons
  • Laser Applications
  • Laser Beams
  • Laser Science
  • Lasers
  • Light (Electromagnetic Radiation)
  • Material Degradation Processes
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Optical Properties
  • Optics
  • Thermodynamics

Fields of Study

  • Engineering
  • Physics

Readers

  • Defense Technology Research and Development.
  • Optical Physics and Photonics.
  • Thin Film Deposition Science.

Technology Areas

  • Biotechnology
  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene