Laser Applications in Microelectronic and Optoelectronic Manufacturing IV
Abstract
This proceedings contains papers on the following topics: Laser Nanotechnology; Fundamental Processes and Diagnostics of Laser Ablation; Ultrashort Pulse Laser Processing; Laser-induced Modification of Surface and Subsurface Properties of Materials; Innovative Laser Technology for Industrial Applications; Laser Surface Cleaning and Crystallization; Laser Microfabrication and Micromachining; Novel Methods and New Tools for Photon Processing; Pulsed Laser Deposition, Nanoclusters, Trybological and Diamond Films.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 15, 1999
- Accession Number
- ADA372739
Entities
People
- Ernst W. Kreufz
- Henry Helvajian
- Jan J. Dubowski
- Koji Sugioka
Organizations
- SPIE