Evaluation, Revision and Application of the NBS Stylus/Computer System for the Measurement of Surface Roughness

Abstract

This report describes in detail the hardware and software used at NBS to implement on a stylus instrument/minicomputer system the process of calibrating the system with an interferometrically measured step and the calculation of important characterizations of surface profiles. The characterizations of a profile which may be calculated include the arithmetic average value, the mean square value, the amplitude density function, the autocorrelation function and the average wavelength. The report also includes a statistical evaluation, using empirical and analytical techniques, of the calibration procedure's long term stability.

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Document Details

Document Type
Technical Report
Publication Date
Apr 01, 1976
Accession Number
ADA375631

Entities

People

  • E. C. Teague

Organizations

  • National Institute of Standards and Technology

Tags

Communities of Interest

  • Advanced Electronics
  • Biomedical
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Accuracy
  • Computational Science
  • Computer Programming
  • Computer Programs
  • Computer Science
  • Computers
  • Data Acquisition
  • Data Analysis
  • Data Processing
  • Engineers
  • Information Processing
  • Information Science
  • Literature Surveys
  • Measurement
  • Operating Systems
  • Processing Equipment
  • Test And Evaluation

Fields of Study

  • Physics

Readers

  • Approximation Theory.
  • Computational Modeling and Simulation
  • Thin Film Deposition Science.