Roll-to-Roll, Projection Lithography System for High-Resolution Patterning of Flexible Substrates, Volume 1

Abstract

This Final Report describes the ANVIK 3100 SRE roll-to-roll lithography system which was shipped to Sheldahi, Inc. (Longmont, CO) in May 1998. The machine is currently being phased into Sheldahl's production facilities where it will be used for microelectronic fabrication on flexible substrates. In the Report, a general overview of the system is presented

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Document Details

Document Type
Technical Report
Publication Date
May 01, 1999
Accession Number
ADA375710

Entities

People

  • K. Jain
  • M. Zemel
  • N. Farmiga
  • T. J. Dunn

Tags

Communities of Interest

  • Advanced Electronics
  • Air Platforms
  • Sensors
  • Space

DTIC Thesaurus Topics

  • Air Force
  • Air Force Facilities
  • Air Force Research Laboratories
  • Circuit Boards
  • Excimer Lasers
  • Fabrication
  • Flexible Materials
  • High Resolution
  • Light Sources
  • Lithography
  • Manufacturing
  • Materials
  • Photolithography
  • Printed Circuits
  • Production
  • Stress Relieving
  • Substrates

Fields of Study

  • Physics

Readers

  • Nanofabrication and Microfabrication.
  • Software Engineering

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene