Energy-Dispersive, X-Ray Reflectivity Density Measurements of Porous SiO2 Xeorgels

Abstract

X-ray reflectivity has been used to nondestructively measure the density of thin, porous, SiO2-based xerogels. Critical angle, defined by total external reflection, was measured for multiple x-ray energies to correct for sample misalignment error in me determination of the density for the films. This density was used to extrapolate the percentage of porosity, assuming a bulk SiO2 density standard. The results were compared to those obtained by Rutherford backscattering and ellipsometry techniques.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 2000
Accession Number
ADA376111

Entities

People

  • Avinash Kumar
  • D. Windover
  • S. L. Lee
  • T. -m. Lu
  • Wonho Lee

Organizations

  • United States Army Armament Research, Development and Engineering Center

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies
  • Weapons Technologies

DTIC Thesaurus Topics

  • Detectors
  • Dielectric Films
  • Dielectric Permittivity
  • Dielectric Properties
  • Dielectrics
  • Films
  • Materials
  • Measurement
  • Misalignment
  • Porosity
  • Porous Materials
  • Reflection
  • Reflectivity
  • Refractive Index
  • Standards
  • X Rays
  • X-Ray Reflectometry

Fields of Study

  • Physics

Readers

  • Mathematics or Statistics
  • Thin Film Deposition Science.