Laser Drive Microfabrication in Glasses: Applications to Rapid Prototyping of Micro-Optics and Submicron Structures

Abstract

This grants were focused on the development of a compact and highly automated workstation capable of directly writing submicron features in semiconductor doped glasses. This equipment grant was in parallel to a research grant entitled "Laser driven microfabrication in glasses: applications to rapid prototyping and micro-optical and sub-micron structures.

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Document Details

Document Type
Technical Report
Publication Date
May 01, 2000
Accession Number
ADA376523

Entities

People

  • N. M. Lawandy

Organizations

  • Brown University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Classification
  • Detectors
  • Electrical Engineering
  • Engineering
  • Fabrication
  • Information Operations
  • Information Systems
  • Lasers
  • Microfabrication
  • Physics
  • Product Prototyping
  • Prototypes
  • Security
  • Semiconductors
  • Software Prototyping
  • Yag Lasers

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Optical Physics and Photonics.
  • Research Science/Academic Research

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Microelectromechanical Systems