A Novel Multi-Aperture Device for Surface Roughness Measurement
Abstract
The objective of this research program is to develop a novel multi-aperture device for the surface roughness measurement. The successful fabrication of this novel device can provide the U.S. Army a handy, in situ, cost-effective. real-time tool for the precise measurement of work piece surface roughness. We have accomplished all the proposed research tasks. Specifically, (1) design and fabricate a novel multiple aperture surface roughness measurement prototype. (2) The performance of the prototype was carefully evaluated. In particular, the depth resolution as a function of the focal length of the micro lens was analyzed. It was found that the depth resolution as high as 0.05 micrometer could be achieved. (3) Combine the micro tube structure with x-direct transversal scanning. Therefore, much more data points can be obtained. In addition, not only the surface roughness but also the surface profile information can be detected. A patent on this technique was filed. Hopefully, an useful commercial product could be built based on the achievements of this research project, which will benefit both the military and civilian users.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 2000
- Accession Number
- ADA379613
Entities
People
- Shizhuo Yin
Organizations
- Pennsylvania State University