X-Ray Digital Image Plate Detector for Phase and Texture Analyses of Thin Tantalum Films
Abstract
An x-ray digital image plate detector was used to conduct phase and texture analyses of thin tantalum films in several seconds using a conventional, fixed copper anode, x%ay tube. This plate imaging method provides an expansion of grazing-incidence x-ray diffraction, out of the goniometer plane. The method exploits Laue flat plate geometries and "tall" Debye-Scherrer camera methods. The film studied shows 200-nm of sputter-deposited, (alpha-phase tantalum, showing <110> fiber texture grown on a silicon (100) substrate. Image plate texture information was presented, and confirmed through comparison with conventional pole figure and 20 Bragg analyses.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 2000
- Accession Number
- ADA380800
Entities
People
- D. Windover
- E. Barnat
- J. Summers
- S. L. Lee
- T. M. Lu
Organizations
- United States Army Armament Research, Development and Engineering Center