Image Plate X-Ray Diffraction and X-Ray Reflectivity Characterization of Protective Coatings and Thin Films
Abstract
Two-dimensional image plate applications in x-ray diffraction and x-ray reflectivity characterization, using grazing-incidence geometry and radiation from a conventional x-ray tube, were explored. X-ray diffraction and x-ray reflectivity data were obtained from a conventional diffractometer with Si(Li) detector. These data complement image plate results to give more complete phase and structure information. Protective chromium coatings, electrochemically deposited onto the bore of steel cylinders, were investigated. Retained austenite content in martensitic steel was measured in simulated, inside-diameter, bore geometry. This approach demonstrates the versatility of the method for nondestructive chemical analysis and phase differentiation of interior bore surfaces in piping structures. MATLAB-based processing software was developed to facilitate quantitative image analysis, including multiple 20 scans, chi-plots, and pole figure reconstruction from multiple phi images, where chi and chi designate, respectively, specimen tilt and rotation. In x-ray reflectivity applications, 12-nm tantalum and 80-nm tantalum oxide thin films sputtered on (100)-oriented silicon wafers were investigated. Density and thin-film thickness were obtained from specular reflectivity modeling involving the periodicity of the interference fringes. Two- dimensional Kiessig interference-fringe images were analyzed and compared to conventional specular x-ray reflectivity images for the measurement of thin-film thickness and thickness uniformity over a sample.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 2000
- Accession Number
- ADA380825
Entities
People
- D. Windover
- M. Doxbeck
- S. L. Lee
- T. M. Lu
Organizations
- United States Army Armament Research, Development and Engineering Center