DURIP 99 High Repetition Rate Laser Vaporization Source for Cluster Ion Beam Deposition
Abstract
A 100 Hz repetition rate laser vaporization source was designed and fabricated. The source has been tested by production of cluster ions from a wide variety of metals, and is currently used in a cluster ion beam deposition experiment.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 20, 2000
- Accession Number
- ADA381571
Entities
People
- Scott L. Anderson
Organizations
- University of Utah