DURIP: Instrumentation for Precision Rapid Prototyping of Systems for Optoelectronic Circuits and Devices

Abstract

This proposal requested instrumentation to make our direct writing instrumentation at Columbia capable of sub micrometer overlay and registration and to provide new capability for testing integrated optical devices. This instrumentation thus included the purchase of new more rugged laser systems and optical stages and optics. Additional computers were needed to update the control systems for the apparatus and make them more compatible with in situ control. In addition two new, more-stable laser tubes were included to improve writing reliability. Additional instrumentation for subsequent lithographic patterning was also to be purchased. Finally a new optical system for testing The fabrication quality was to be purchased.

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Document Details

Document Type
Technical Report
Publication Date
May 31, 2000
Accession Number
ADA382471

Entities

People

  • Richard M. Osgood, Jr.

Organizations

  • Columbia University

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Brushless Dc Motors
  • Circuits
  • Corner Reflectors
  • Fabrication
  • Instrumentation
  • Lasers
  • Measurement
  • Mechanical Jamming
  • New York
  • Optical Circuits
  • Photonic Devices
  • Photonic Integrated Circuits
  • Precision
  • Product Prototyping
  • Semiconductors
  • Silicon Carbide
  • Software Prototyping

Fields of Study

  • Physics

Readers

  • Aerospace Test and Evaluation
  • Nanofabrication and Microfabrication.
  • Optical Physics and Photonics.

Technology Areas

  • Directed Energy
  • Microelectronics