Portable Coupled Field CAD

Abstract

Coyote Systems has developed a coupled CAD tool for Microelectromechanical Systems (MEMS), called AutoMEMS, which accurately simulates the coupled fields in large, realistic MEMS devices with minimal user input. AutoMEMS generates a three dimensional (3D) solid model from a user-supplied two dimensional device layout. A device mesh is then created from the 3D solid model which can be automatically and adaptively refined for accurate results. Simulations are the conducted utilizing a fast Boundary Element Method (BEM). The resulting cross-capacitances and electrostatic forces can be automatically extracted. The final version of AutoMEMS was developed in a C++ environment using gnu-style tools and high-speed portable OpenGL graphics which allows it to run on Linux and Unix platforms. Two particular examples used to demonstrate the functionality of AutoMEMS were of a micromirror and Analog Devices ADXL76 accelerometer. Thus, an effective and easy-to-use MEMS simulation tool was developed and demonstrated.

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 2000
Accession Number
ADA382657

Entities

People

  • Per Liung

Tags

Communities of Interest

  • Advanced Electronics
  • Engineered Resilient Systems

DTIC Thesaurus Topics

  • Boundary Element Methods
  • Computational Fluid Dynamics
  • Computational Science
  • Computer-Aided Design
  • Computers
  • Differential Equations
  • Geometry
  • Graphical User Interface
  • Information Systems
  • Microelectromechanical Systems
  • Numerical Analysis
  • Operating Systems
  • Partial Differential Equations
  • Simulations
  • Simulators
  • Three Dimensional
  • Two Dimensional

Readers

  • Computational Fluid Dynamics (CFD)
  • Database Systems and Applications
  • Integrated Circuit Design and Technology.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems