Silicon-on-Sapphire Material and Device Properties at High and Low Temperature
Abstract
The aim of this paper is to present a thorough examination and update the electrical properties of recent silicon on sapphire wafers.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 05, 1999
- Accession Number
- ADA382766
Entities
People
- D. Munteanu
- Isaac Lagnado
- Paul De La Houssaye
- S. Cristoloveanu