Research in Mechanics of MEMS Devices

Abstract

The objectives of the program are to investigate the validity of current solid mechanics principles for MEMS devices and to develop innovative experimental techniques for determining mechanical properties for MEMS elements. The task performed in FY98 was the study of Raman frequency shift of single-crystal silicon material under stresses using Raman spectroscopy. The study results, including development of the Eigenvalue equation for calculating the Raman frequency shift, experimental measurements on Raman frequencies for single-crystal silicon, and associated analyses, are presented in this report.

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Document Details

Document Type
Technical Report
Publication Date
Sep 10, 2000
Accession Number
ADA382871

Entities

People

  • A. D. Birkitt
  • D. J. Chang
  • S. T. Amimoto

Organizations

  • The Aerospace Corporation

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Crystal Lattice Vibrations
  • Crystal Lattices
  • Crystal Structure
  • Crystals
  • Eigenvalues
  • Equations
  • Frequency
  • Frequency Shift
  • Materials
  • Materials Laboratories
  • Measurement
  • Mechanics
  • Microelectromechanical Systems
  • Raman Spectroscopy
  • Single Crystals
  • Spectroscopy
  • Two Dimensional

Fields of Study

  • Engineering

Readers

  • Control Systems Engineering.
  • Materials Science and Engineering.
  • Nanoscale Plasmonic Nanotechnology