Low Temperature Scanning Electron Microscope for Fabrication and Characterization of High-Tc Josephson Junctions and Circuits

Abstract

Liquid helium cooled TEM/STEM sample holder with electrical access to thin film samples is developed. The cryogenic sample holder was used together with a Nabity Nanometer Pattern Generation System to investigate important issues, such as the threshold energy and amount of exposure, in the fabrication of electron beam modified planar Hg-1212 Josephson junctions. The results indicate that for beam energy less than about 80 keV the changes in the superconducting properties of Hg-1212 thin films are temporary. In addition, the amount of exposure required to make junctions with stable properties makes the technique useful only for circuits of a few junctions.

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Document Details

Document Type
Technical Report
Publication Date
Sep 21, 2000
Accession Number
ADA383240

Entities

People

  • Judy Z. Wu
  • Siyuan Han

Organizations

  • University of Kansas

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Data Acquisition
  • Electrical Properties
  • Electron Beams
  • Electron Microscopes
  • Electron Microscopy
  • Electrons
  • Fabrication
  • Films
  • Josephson Junctions
  • Low Temperature
  • Microscopes
  • Microscopy
  • Scanning
  • Scanning Electron Microscopes
  • Signal Generators
  • Superconductors
  • Thin Films

Fields of Study

  • Physics

Readers

  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene