Procedure for Substrate Temperature Control Using the Pyrometer During MBE Growth

Abstract

Command procedures have been developed for the Army Research Laboratory molecular beam epitaxy (MBE) computer control system that allow a user to automatically outgas and desorb the oxide from substrates before growth, as well as set substrate temperatures based on pyrometer readings during growths. These procedures allow completely unattended growth of structures once suitable temperatures have been determined.

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Document Details

Document Type
Technical Report
Publication Date
Oct 01, 2000
Accession Number
ADA383900

Entities

People

  • Stefan P. Svensson

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Climate Change
  • Computers
  • Control Systems
  • Critical Temperature
  • Electron Mobility
  • Electrons
  • High Electron Mobility Transistors
  • Military Research
  • Molecular Beam Epitaxy
  • Molecular Beams
  • Optical Pyrometers
  • Outgassing
  • Pyrometers
  • Substrates
  • Temperature Control
  • Thermocouples

Readers

  • Semiconductor Device Technology
  • Software Engineering
  • Spectroscopy.